Stock shape of 100% PBI for semiconductor manufacturing process

Heat resistanceWear resistance

 Compression molding 

SCM7000HP is a 100% PBI stock shape made by compression molding: PBI Method and it shows low metals content and low outgassing properties.

Characteristics of SCM7000HP

High purity:
Low metals content, Low outgassing

Mechanical property:
Excellent mechanical strength, hardness

Thermal property:
Ultra high heat resistance, Low CLTE, Low thermal conductivity

High energy resistance:
Good plasma resistance

Chemical resistance:
Resistance for organic solvents, acids, and bases

Typical properties of SCM7000HP

Item Condition Standard Unit Property
SCM7000HP
Tensile strength 23°C ISO 527 MPa 160
Tensile strain at break
 23°C ISO 527 % 3.0
Flexural strength 23°C ISO 178 MPa 220
Flexural modulus 23°C ISO 178 GPa 6.5
Charpy notched impact strength
 23°C ISO 179 kJ m-2 4.0
Coefficient of linear thermal expansion < Tg JIS K7197 ppm °C-1 23
Surface resistance 23°C ANSI/ESD STM11.13 Ω
 > 1013
Water absorption 23°C, 24 hr ISO 62 % 0.40

These values are not to be construed as specifications.

 

Lineup of SCM7000HP

Shape Square / mm Thickness / mm MOQ/SPQ
Plate 305 10 1/1
20
30
40
50